中文摘要：

利用透射光谱矩阵光学原理，对三种GaN或AlGaN外延薄膜的透射光谱进行了分析．在传统的透射光谱拟合方法的基础上，添加了表征材料表面粗糙度、膜内散射情况的拟合参量，拟合曲线与实验曲线达到了准确的吻合．结果表明：外延薄膜透射光谱的拟合可以准确提取出材料的消光系数、袁面状况、散射情况、折射率及厚度，从而对样品质量作出详细的分析．

英文摘要：

The transmission spectra of the GaN and AlGaN epitaxial films were analyzed in detail on the study of the matrix optics. According to the conventional fitting methods, the surface roughness and scattering conditions were considered. The fitting curve and the experimental curve were well consistent. It is shown that the extinction efficiency, surface roughness, scattering conditions, refractive index and thickness of the films can be extracted successively by the fitting of the transmission spectra.