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中文摘要：
研究了新型热释电材料驰豫铁电单晶（1-x）Pb（Mg1／3Nbz／a）O3-xPbTiO3（PMNT）的低损伤减薄工艺、电极成型和耦合封装等关键技术，研制了基于PMNT的单元热释电探测器。对减薄后约30um晶片材料性能的测试分析表明，部分样品的热释电系数约为9．0×10^-4C／m^2K，无明显衰减。采用低噪声电路提取单元探测器的微弱热释电电流，对所研制的单元探测器性能进行了测试分析。
英文摘要：
PMNT single crystal is a novel pyroelectric material with superior pyroelectric performance. The fabrication of pyroelectirc infrared detectors based on PMNT single crystal, including lapping and polishing of the crystal, metallization and assembly,is carried out. The pyroelectric coefficient of PMNT chip with thickness of 30 um is measured and the results indicate that the pyroelectric coefficients of some chips are 9.0 × 10^-4 C/m2K, similar to that of the PMNT single crystal with thickness of 500 um. Weak pyroelectric current is extracted by a low-noise circuit, and the performance of the fabricated detector is tested and analyzed.
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