中文摘要：

结合边界层分离点附近的切应力变化规律，对边界层分离特性进行研究，确定边界层分离点的判定依据。采用分立元件通过表面贴装工艺来实现柔性微型热膜传感器阵列的集成，并研究该传感器阵列中敏感元件、柔性衬底的设计及传感器的排布，解决柔性传感器阵列对微细加工工艺要求较高的难题。根据边界层分离点判定依据，在低速风洞试验中对传感器阵列的性能和传感器阵列输出信号采用统计量算法和傅里叶变换功率谱算法进行处理判断，并与计算流体力学仿真结果对比，结果表明制造的微型热敏传感器阵列能够实现对流体边界层分离位置的在线测量。

英文摘要：

Through analyzing the character of the shear stress near the separation point of the boundary layer, the determination methods of the location of the fluid separation point have been presented. Using the surface mount technology to integrate the discrete devices and flexible substrate, the design of the device and polyimide sub-layer are fulfilled to settle the micro sesor array craft puzzle. Based on the criterion algorithm and faster Fourier transformation methods of sensor array output voltage, the flexible sensor array with the processing system has been tested in the low speed wind tunnel. The results demonstrate that the dynamic and real-time performance of the system can been fulfilled.