中文摘要：

面向先进主动流动控制，在国内率先研发了一种基于微机电系统（MEMS）的气泡型微致动器阵列技术。分析了气泡型微致动器用于主动流动控制的原理，阐述了致动器结构及其加工工艺。通过对气泡样件的压力载荷-变形行为的测试，表明其具有较好的线性和较大承载能力。结合不同翼型的风洞试验表明，微致动器作动可以影响翼型表面的压强分布，从而可用于增升等控制目的。

英文摘要：

A micro balloon actuator array specially used for active flow control is developed for the first time in China with micro-electro-mechanical systems （MEMS） technology. The operation approach of active flow control with the micro balloon actuators is described. And the structure and novel fabrication method of the actuator are presented. Load-actuation deformation behavior of the actuator is characterized, which shows that this kind of actuator possesses a high load limitation and nearly linear relationship between load and actuation deformation. Wind tunnel experiments are carried out. And the results indicate that the micro balloon actuator can be an effective means for the purpose of drag reduction or lift increase of airfoil.