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Systematic considerations for the patterning of photonic crystal devices by electron beam lithograph
  • ISSN号：0030-4018
  • 期刊名称：Optics Communications
  • 时间：0
  • 页码：241-247
  • 语言：英文
  • 相关项目：面向光子集成的半导体光子晶体有源与无源器件关键技术研究
作者： Yu, Hejun|Yu, Jinzhong|Sun, Fei|Chen, Shaowu|Li, Zhiyong|
同期刊论文项目
面向光子集成的半导体光子晶体有源与无源器件关键技术研究
期刊论文 56 会议论文 13 专利 6
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