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Study of piezo-induced surface vibration in solids using atomic force probe
  • ISSN号：0000-1902
  • 期刊名称：Key Engineering Materials
  • 时间：2013.5.31
  • 页码：1214-1217
  • 相关项目：基于同步辐射LIGA技术的微纳驱动器件制备及其驱动新方法研究
作者： Fang hao Li, Dongxian Zhang, Haijun Zhang.|
同期刊论文项目
基于同步辐射LIGA技术的微纳驱动器件制备及其驱动新方法研究
期刊论文 38 会议论文 2
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