中文摘要：

研究了抛光对化学气相沉积金刚石自支撑膜断裂强度的影响。结果表明，金刚石自支撑膜粗糙表面所带来的V形缺口会降低其断裂强度，而且随着膜厚的增加，降低的程度越明显，通过抛光粗糙表面，消除了V形缺口对断裂强度的影响，有利于提高金刚石膜的抗破坏能力。提出了一种金刚石膜断裂强度的经验计算方法，获得的断裂强度值更接近于金刚石膜的本征断裂强度。

英文摘要：

The effect of polishing on fracture strength of free-standing CVD diamond films was investigated. Results indicate that the fracture strength of diamond films was reduced by the V shapes induced by the rough surface. The thicker the fihns were the more rapidly the fracture strength declined. Erasing the rough surface by polishing can improve the fracture strength of thick diamond films efficiently. An experimental calculation method was suggested, which can get the fracture strength of freestanding CVD diamond films closed to the essential strength.