中文摘要：

应用factsage软件研究三氯氢硅合成的复杂化学反应,绘制了体系中存在的8个化学反应的ΔG-T图。分析了当反应达到平衡,在0.01MPa、0.05 MPa和0.1 MPa以及进料比xHCl/xSi为1、3和6时,气相平衡组分分布与温度的关系。讨论了三氯氢硅产率随温度、压强及进料比xHCl/xSi的变化情况。结果表明,低温、高压和一定进料比xHCl/xSi对三氯氢硅合成过程有利。

英文摘要：

The complex chemical reactions of trichlorosilane synthesis were investigated by means of thermodynamic software factsage.Diagrams of for the eight chemical reactions in this system versus temperature were plotted.When the reaction reached equilibrium,the relationship between gas phase compositions and temperature was analyzed at HCl/Si molar ratio of 1,3 and 6 under the pressure of 0.01 MPa,0.05 MPa and 0.1 MPa,respectively.The variation of trichlorosilane productivity with temperature,pressure and HCl/Si molar ratio were discussed.The results show that a lower temperatures,a higher pressures and a suitable HCl/Si molar ratio have a positive effect on the trichlorosilane synthesis process.