中文摘要：

采用微电子工艺在高电阻率硅片上设计和制备了一种新颖紧凑共平面波导馈电天线，并对其进行了仿真和测试，模拟和测试结果比较吻合，经过实验测试得到天线为水平和垂直双向辐射，天线的增益约为2．5dB，谐振频率约为3GHz，此天线有利于天线集成和与CMOS工艺等的兼容，并且对于无人驾驶飞机、卫星等飞行器的雷达和通讯等天线系统的设计具有参考价值。

英文摘要：

In this paper, a novel compact CPW-fed slot antenna was designed and fabricated on high-resistivity silicon （HR-Si） by micro-electronics process. The results of simulation are consistent with the results of measurement for the antenna. The mode of the antenna is vertical and horizontal bi-directional radiations. The gain of antenna is 2.5 dB and the resonance frequency approximately is 3 GHz. This fabrication can be compatible with antenna integration and CMOS process. The parameters of this antenna are for reference radar antenna system of Unmanned Aerial Vehicles （UAV）, satellite transmission and communication.