中文摘要：

一种基于UV-LIGA加工技术的双稳态电磁型RF MEMS开关，由于其结构使用了永磁体单元而使得开关在维持“开”或“关”态时不需要功耗，从而实现低功耗的电磁驱动.利用非接触式Wyko NT1 100光学轮廓仪所附带的动态测量系统（DMEMS），对开关的动态响应进行了测量.测量结果表明开关实现了双稳态驱动，开关实现状态完全切换到位对应的响应时间不到20μs.

英文摘要：

Due to the use of permanent magnet in structure,a bistable electromagnetic radio frequency micro-electro-mechanical systems （RF MEMS） switch based on UV-LIGA technology requires no energy to remain at ＂on＂ or ＂off＂ state. And the electromagnetic actuation with low power consumption can be achieved. The dynamic characterization of the switch was successfully measured using DMEMS dynamic measurement system attached to wyko NT1 100 optical profiling system supplied by Veeco instruments Co. ,Ltd. The results of test showed that the bistable electromagnetic actuation is achieved, and the switching time is less than 20 μs.