中文摘要：

设计、制作并测试了一种新颖的x轴音叉式微机械陀螺，它以“8悬臂梁-质量块”结构来实现Coriolis力的检测，与常见的单层弹性梁-质量块结构相比，具有更好的模态稳定性；大质量块与薄弹性梁的结构设计有助于获得低机械噪声与高灵敏度.采用体硅微机械加工工艺在（111）硅晶圆上试制了基于“8悬臂梁-质量块”结构的微陀螺，由于在（111）晶向上硅的湿法腐蚀速率极其缓慢，而用氧化硅填充的限制槽限定侧向腐蚀范围，因此这套工艺能对双层弹性梁的结构尺寸进行精确控制，获得较小的模态失配.在大气环境中，该陀螺具有±200°/s的量程，角速度灵敏度为0.15mV/（°/s），分辨率约为0.1°/s.

英文摘要：

A novel x-axis tuning fork MEMS gyroscope with ＂8-beams/proofmass＂ structure for detecting the Coriolis effect is presented. Compared with the common single-plane beams,the 8 vertical beams,symmetrically located at the top and bottom sides,more stably suspend the large thick proof mass,resulting in large capacitance variation and low mechanical noise. Bulk-micromachining technology is applied to obtain the large proof mass and twin dual beams. During the fabrication process,the dimensions of the beams are precisely confined by thermal oxide-protected limit trench sidewalls and the extremely slowly etched （lll）-planes;therefore a small mismatch of less than 30Hz is achieved before tuning. Initial testing shows a sensitivity of 0.15mV/（°/s） and a rate resolution around 0. 1°/s under atmosphere pressure.