中文摘要：

为了实现微流控芯片的小型化、集成化,设计并制作了一种可定量连续输送微量液体的无阀压电微泵。该微泵采用双腔并联式结构,利用微机电系统（MEMS）技术在硅基片上制作了具有扩散口/喷口无阀结构的出入水口,采用压电双晶片作为驱动部件,以聚二甲基硅氧烷（PDMS）作为泵膜。测试结果表明,泵膜的厚度、工作频率和电压对微泵的输出流速均有明显的影响,在频率1 100 Hz及电压80 V时,双腔体并联式无阀压电微泵的最大流速为210μL/min,约为相同结构单腔体微泵流速的1.5倍。

英文摘要：

In order to realize the miniaturization and integration of the microfluidic chips,a miniature valveless piezoelectric micropump was studied which could transport the micro flow of liquid quantificationally and continuously.The structure of the micropump was fabricated with parallel double chambers,a diffuser and a nozzle unit based on MEMS technology as the entrance and exit,and a piezoelectric bimorph was used as the actuator which utilizes poly-dimethylsiloxane（PDMS） as diaphragm.The flow rates of the micropump were measured,and the results showed that the flow rates were influenced by the thickness of the membrane,frequency and voltage,when a sine wave of 80 V and 1 100 Hz was applied,the maximum flow rate of the valveless piezoelectric micropump in parallel with double chambers reached to 210 μL/min,which was 1.5 times as the micropump with the same single-chamber structure.