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Design and control of a high-acceleration precision positioning system using a novel flexible decoup
  • ISSN号：0954-4062
  • 期刊名称：Proceedings of the Institution of Mechanical Engin
  • 时间：0
  • 页码：431-442
  • 语言：英文
  • 相关项目：纳米级微定位系统热误差辨识与补偿关键技术研究
作者： Zhang, D.|Wu, Y.|Tian, Y.|Zhao, X.|Wang, F.|Shirinzadeh, B.|
同期刊论文项目
纳米级微定位系统热误差辨识与补偿关键技术研究
期刊论文 24 会议论文 2
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