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Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：0
  • 页码：230-241
  • 语言：英文
  • 相关项目：纳米级微定位系统热误差辨识与补偿关键技术研究
作者： Tian, Y.|Zhang, D.|Shirinzadeh, B.|
同期刊论文项目
纳米级微定位系统热误差辨识与补偿关键技术研究
期刊论文 24 会议论文 2
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