针对系统级封装技术(SIP,system in package)详细分析了穿透性硅通孔(TSV,through silicon via)的半径、高度和绝缘层厚度等物理结构对于三维系统级封装传输性能的影响,提出了TSV吉赫兹带宽等效电路模型,并提取出其电阻、电容、电感等无源元件值,对于所提出的电路模型进行了时域分析,仿真给出了眼图。
The impact of physical configurations such as through silicon via (TSV) radius, TSV height and thickness of SiO2 on the transmission performance of system in package (SIP) is explored. A gigahertz equivalent circuit model of TSV in 3D Integrated Circuits is proposed and the values of passive elements within the model are extracted from full-wave scattering parameters. The proposed circuit model is analyzed in time domain, and the eye-diagram is shown based on the proposed circuit model.