中文摘要：

高温超导薄膜具有良好的物理性能，其微细图形在微电子器件中有非常广泛的应用。概述了高温超导薄膜微细图形的制备工艺及研究进展，重点介绍了高温超导薄膜微细图形制备方法中的光刻法、改性工艺、耐熔微掩膜制备法和Sol-gel法与化学修饰法相结合的基本原理、工艺特点及最新研究进展。首次把Sol-gel法与化学修饰法相结合制备薄膜的微细图彤的工艺用于高温超导薄膜微细图形的制备中。

英文摘要：

High temperature superconducting films have excellent physical properties. Their fine-patterning is used widely in the field of microelectronics. In this paper the preparation technology and research progress of fine-patterning of high temperature superconducting films are sammerized. The principle of preparation method of fine-patterning including photolithography, heat-resistant microshadow mask technique,sol-gel process with chemical modification are presented in detail. The fine-patterning of high temperature superconducting films is firstly fabaricated using sol-gel process with chemical modification.