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中文摘要：
中文摘要：采用低氟溶胶-凝胶法在Ф 76.2 mm的LaAlO3（LAO）单晶衬底上制备YBCO薄膜，然后对Ф 76.2 mm的YBCO薄膜样品的微观结构、膜厚及超导性能进行均匀性测试分析。结果表明：所制备的薄膜厚度均匀并具有较好的c轴外延生长取向和均匀的超导电性能
英文摘要：
YBCO film was deposited on LaAlO3 （LAO） single crystal substrate of Φ76.2 mm using low-fluorine sol-gel process. The uniformity of microstructure, thickness and superconducting properties of the Φ76.2 mm YBCO film were analyzed. The results show that the whole film has uniform thickness and exhibits good c-axis epitaxial growth orientation and excellent uniform superconducting properties
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