以苯酰丙酮[BzAc]作为化学修饰剂,采用溶胶一凝胶法合成了含铜的螯合物,研究了含铜螯合物的紫外、红外光谱特性。发现在330nm处有与含铜螯合物相关的吸收峰,当紫外光照射该凝胶薄膜后,与含铜螯合物相关的吸收峰逐渐变弱,含铜螯合物分解。伴随着螯合物的分解,其凝胶薄膜在有机溶剂中的溶解性迅速降低,从而表现出紫外光感应特性,利用这种光感应特性,可获得该凝胶薄膜的微细图形。再经过500℃热处理,得到了具有立方相氧化铜薄膜的微细图形。
Copper chelates were prepared by sol-gel process using benzalacetone (BzAcH) as chemical modification. The UV-absorption spectra and FT-IR spectra of the copper chelates were investigated. The UV absorption peak corresponding to the chelate was detected at around 330 nm, and it weakened after UV irradiation. These findings show that the UV irradiation will dissociate the chelate. Due to the dissociation of the chelate complex, the solubility in some organic solvents is remarkably decreased. Utilizing the photosensitivity, the fine patterning of the gel films was prepared by irradiating the gel film with UV light through a pattern mask and dissolving the non-irradiated area in suitable solvent and annealing at 500 ℃. The results of XRD pattern test show that the CuO fine pattern films are of cubic phase.