以硝酸镧和醋酸镍为原料,利用化学溶液法在硅基底上制备了具有良好导电性的LaNiO3(LNO)薄膜。以醋酸铅、硝酸氧锆、钛酸丁酯、硝酸铁、醋酸钴为原料,合成了Pb(Zr0.52Ti0.48)O3-CoFe2O4(PZT-CFO)溶液,并在LNO/Si薄膜上制备了PZT-CFO复合薄膜。通过X射线衍射、扫描电镜和电-磁测试研究了PZT-CFO复合薄膜的相结构、表面形貌、铁磁和铁电性能。结果表明:钙钛矿结构的PZT相和尖晶石结构的CFO相以纳米晶形式共存于PZT-CFO复合薄膜中,无其他杂相产生。750℃煅烧1h的PZT-CFO复合薄膜的剩余极化强度达6μC/cm^2,剩余磁化强度可达20kA/m,表现出良好的铁磁、铁电双重特性。
LaNiO3(LNO) films were prepared on silicon substrate by chemical solution deposition(CSD) method using nickel acetate and lanthanum nitrate as raw materials.Using lead acetate,zirconyl nitrate,tetrabutyl titanate,iron nitrate,and cobalt acetate as raw materials,a stable Pb(Zr0.52Ti0.48)O3-CoFe2O4(PZT-CFO) solution was prepared.PZT-CFO nanocomposite films were fabricated on silicon substrate with LNO film as electrode by CSD process.The phase structure,surface morphology,ferromagnetic and ferroelectric properties of PZT-CFO composite films were investigated by X-ray diffraction,scanning electron microscopy and electromagnetic test.The results show that perovskite PZT and spinel CFO phases coexist in PZT-CFO composite films without other impurity phases.The remanent polarization Pr and remanent magnetization Mr of PZT-CFO composite films calcined at 750 ℃ for 1 h are 6 μC/cm2 and 20 kA/m,respectively,and it displays the good ferromagnetic and ferroelectric properties.