以阳极氧化法制备的二氧化钛纳米管阵列为模板,结合水热法制备了钛酸锶钡纳米管阵列薄膜。讨论了Ba1-xSrTiO3纳米管阵列薄膜的结构、形貌和电学性能。用X射线衍射仪表征其晶体结构;扫描电子显微镜观察其表面及断口形貌;以及用宽频介电阻抗谱仪测试其介电性能。结果表明:在较为温和的条件下用水热法制备了立方相及四方相的Ba1-xSrTiO3纳米管阵列薄膜;纳米管孔径在65~80nm之间,薄膜厚度可达10μm以上;经热处理之后的薄膜样品在1kHz介电常数可达338,介电损耗为0.46。
Ba1-xSrTiO3 nanotube arrays thin films were prepared via hydrothermal method, anodized TiO2 nanotube arrays as template. The structure, morphology and electrical properties of Ba1-xSrTiO3 nanotube arrays thin films were discussed. The crystal structure was characterized by X-ray diffraction, the surface and fracture morphology observed by scanning electron microscopy, and the dielectric properties tested by broadband dielectric spectrometer. The result shows that the Ba1-xSrTiO3 nanotube arrays thin films of cubic phase and tetragonal phase were prepared by hydrothermal method in mild condition; the diameter of nanotubes is between 65-80 nm, the thickness of thin films is up to 10μm; the dielectric constant of thin film samples after heat treatment in 1 kHz is 338, the dielectric loss is 0. 46.