中文摘要：

在标准CMOS工艺下,设计了一种与CMOS工艺兼容的片上集成太阳能电池阵列,通过从外部环境收集光能为UHF射频识别（RFID）标签供电。采用SMIC 0.18μm CMOS工艺制备出太阳能电池阵列,其面积约为0.2mm2;在AM1.5、1 000W/m2、25℃标准测试条件下,测得最大输出功率为10.212μW,短路电流和开路电压分别为28.763μA和0.458V,光电转换效率为5.106%。相对于常规Si太阳能电池复杂的制造工艺,本文太阳能电池阵列与CMOS工艺相兼容,可与电路系统集成从而实现片上供电。

英文摘要：

In this paper,the CMOS-compatible micro solar cell arrays with chip-scale designed in standard CMOS process are presented,which will receive solar energy from the environment and supply the UHF radio-frequency-identification（RFID） tag.The solar cell test chip is implemented by SMIC 0.18 μm CMOS technology with approximately 0.2 mm2 active area.The maximum output power obtained at AM 1.5,1 000 W/m2 and 25 ℃ is 10.212 μW,and the short-circuit current and open-circuit voltage are 28.763 μA and 0.458 V,respectively.The photoelectric conversion efficiency is 5.106%.In contrast to the complex manufacture processes for conventional solar cell,the CMOS solar cell is compatible with standard CMOS technology and can be integrated on the same chip to supply energy for the system.