中文摘要：

提出了一种结构简单,制造工艺容易实现的硅微机械二维倾角传感器结构设计,它由蝶形质量块和连接它们的四个成十字形的硅应变梁以及具有过载限位保护功能的硼硅玻璃衬底构成.传感器能同时检测出绕两轴的倾角变化.分析了硅应变梁的受力情况,得到了与倾角的解析关系,并用有限元方法验证了结果,理论灵敏度为0.75 mV/ °.

英文摘要：

A two-dimension micromechanical inclinometer with a simple structure was designed, which consists of a butterfly-shape silicon mass bulk that is connected by four crossed silicon beams and a BSG glass substrate with a function of over-range protection. The inclinometer could measure the rotating angles of the mass bulk with respect to the two axes within a single sensor element simultaneously. After the stress distribution on a beam was analyzed, an analytic relation of the stress with the angles was obtained and it was proved by the finite-element method. The result indicates that the theoretic sensitivity is 0.75 mV per angle of inclination.