中文摘要：

为了改善叠层模板电沉积技术（LTE）中沉积层的均匀性,以减少辅助工序的工作量,采用直流电流、正脉冲电流和换向脉冲电流3组电流配置进行对比实验,对电流参数包括换向脉冲的脉宽、频率,工作时间、关断时间以及电流密度作了调整和优化.通过对宏观厚度和微观形貌的测量,发现：换向电流配置条件下,模板沉积层具有较好的均匀性,换向脉冲电流的应用可以有效减少LTE工艺的加工难度和加工时间.文中还就换向电流对沉积层整平修饰的作用机理进行了理论分析,并采用优化的换向电流参数制备出了一批截面为20mm×20mm、厚度为4mm的铜质金属实体,证明了该技术的可行性.

英文摘要：

In order to improve the deposition uniformity of laminated template electrodeposition（LTE） and to further simplify the auxiliary operation,three kinds of current configurations including direct current（DC）,anodic pulse current（PC） and pulse-reverse current（PRC） were respectively applied to LTE test,and such parameters of pulse-reverse current as pulse width,pulse frequency,working time,turn-off time and current density were modulated and optimized.Then,the thicknesses and micro-morphologies of the metal layers deposited with different current configurations were compared, finding that PRC offers better deposition uniformity, easier LTE operation and lower time cost. Finally, the function of PRC in diminishing surface roughness was theoretically analyzed, and a batch of copper parts, which are 20 mm × 20 mm in section size and 4mm in thickness, were deposited in optimized PRC conditions. The results verify the feasibility of the LTE with PRC.