中文摘要：

微机械力学性能对微机械的设计、加工等具有重要作用，积累和完善微机械力学性能库已经成为进行微机械研究的重要基础课题。本文根据微力微位移方法进行微构件力学性能测试的要求，研制了微机械力学性能测试仪。论文着重论述了微机械、仪器总体设计方法、各部分方案，并给出了测试结果。

英文摘要：

Since mechanical properties play important roles in the design and fabrication of the micro components, accumulation and perfection of the library has become one of the most important fundamental projects. An instrument for determining the mechanical properties of micro components by the curve between displacement and force is discussed in this paper. According to the requirement of the instrument, we design the whole instrument and discuss several pasts in detail. Development of this instrument will provide a powerful tool to test the properties of the micro machine.