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中文摘要：
准确了解微／纳米特征尺度条件下材料的力学性能是MEMS／NEMS（micro／nano electro-mechanical system）材料实际应用的一个关键前提条件。文中研究基于纳米压入技术的新型MEMS／NEMS材料力学行为的表征方法，包括高聚物、一维结构纳米材料和形状记忆合金等。研究结果表明，纳米压入技术是评定这些新型MEMS／NEMS材料力学性能的有力工具，并可作为有效的实验手段，揭示力学行为与其依存诸因素之间的内在关联。
英文摘要：
Accurately understanding the mechanical properties at micro/nanometer scale is of critical importance for the practical applications of micro/nano electro-mechanical systems （MEMS/NEMS） materials. Micor/nanomechanical characterization methods of several current and potential MEMS/NEMS materials by using nanoindentation technique have been investigated, involving polymers, nanostructures, as well as shape memory alloys （SMA）. The results show that nanoindentation technique is a powerful method to characterize the mechanical properties of these new MEMS/NEMS materials and can also provide an effective experimental tool to reveal the correlation between apparent mechanical behaviors and underlying factors.
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