采用先电子束沉积后退火的两步法制备YBCO超导薄膜;根据薄膜的超导临界电流密度、X射线衍射(XRD)和扫描电镜(SEM)的测试结果,研究了不同预处理气氛对YBCO薄膜结构、表面形貌及超导性能的影响。
YBCO superconducting films were prepared by the BaF2 process.In this process,the precursor films were deposited onto substrate by an electron beam co-evaporation technique.The effect of the pre-annealing atmosphere was investigated by characterization of YBCO films using XRD,SEM and Jc-scan systrm.