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中文摘要：
采用选择区域外延生长技术和对接再生长技术，设计并制作了10信道分布反馈激光器阵列与多模干涉耦合器的单片集成器件。器件中采用了新的技术，集成了钛薄膜热电阻用于波长调谐。集成器件烧结到热沉上后，在25℃温控条件下测试，激光器阵列的平均信道间隔为1．29nm，阈值电流为22～30mA；当激光器注人电流为200mA，各信道的平均出光功率为0．5mw。集成热电阻的调谐效率约为5nm／w，通过施加合适的热电流调谐，该集成器件可以覆盖34路信道间隔为50GHz的波长范围。集成器件可单波长选择输出，也可10信道同时运作合波输出。
英文摘要：
A monolithic integration of ten distributed feedback lasers with a 10 × 1 multimode-interference optical combiner using the selective area growth technology is proposed and demonstrated. In the device, Titanium film thermal resistance for wavelength tuning are integrated with a novel procedure. The device is mounted on heat sink and tested at 20 ℃. The average channel spacing of the device is 1.29 nm. The average output power of lasers is 0.5 mW with a current of 200 mA and threshold currents of 25-30 mA. The tuning efficiency of integrated thermal resistance is about 5 nm/W. The integrated device can cover 34 channels on the 50 GHz ITU （international telecommunication union） grid with a suitable heating power, which can operate separately or simultaneously.
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