测量集体流动率和溪流通过微隧道的煤气的流动的明智的压力分布被许多研究人员报导。在他们在考试被使用以前,对这些数据的评价是关键的滑动模型和数字计划,并且在在各种各样的 MEMS 设备的微隧道元素的设计。根据在微隧道气体流动的集体流动率和压力分布的运动解决方案,可得到的测量数据适当地被使正常化然后与对方相比。测量压力分布的 69 规范的数据在优秀同意,并且他们中的 67 个在 1 ±以内 0.05。在 0.95 和 1 之间变化的集体流动率的规范的数据作为入口 Knudsen 数字 Kn i 【 0.02,但是他们作为 Kn i 】 0.02 与到某程度,一个很有趣的分叉趋势。
Measured mass flow rates and streamwise pressure distributions of gas flowing through microchannels were reported by many researchers. Assessment of these data is crucial before they are used in the examination of slip models and numerical schemes, and in the design of microchannel elements in various MEMS devices. On the basis of kinetic solutions of the mass flow rates and pressure distributions in microchannel gas flows, the measured data available are properly normalized and then are compared with each other. The 69 normalized data of measured pressure distributions are in excellent agreement, and 67 of them are within 1 ± 0.05. The normalized data of mass flow-rates ranging between 0.95 and 1 agree well with each other as the inlet Knudsen number Kni 〈 0.02, but they scatter between 0.85 and 1.15 as Kni 〉 0.02 with. to some extent, a very interesting bifurcation trend.