中文摘要：

为了确保场平爆破不对Intel公司光刻机平台的运行构成威胁,对加速度功率谱密度控制指标下的工程爆破进行研究。在多个工程案例分析的基础上,将加速度谱密度控制指标转化到爆破振动速度控制,预估爆破振动速度峰值为0.05 cm/s。考虑工程成本,部分区域可以采用深孔爆破。经过爆破实验验证,当孔内使用Ms–6,Ms–7,Ms–8段非电导爆管雷管,地表使用Ms–4,Ms–5段非电导爆管雷管,爆破振动速度峰值不大于0.02 cm/s。此时光刻机平台可以安全运行,表明将加速度功率谱密度控制转换到爆破振动速度指标是可行的。这种转换控制法可以为存在精密仪器下的爆破方案设计提供参考。

英文摘要：

In order to ensure that the land leveling blasting will never be a threat to the Intel company lithography platform operation,the acceleration power spectrum density control indexes for engineering blasting were studied. Based on the analysis of multiple project cases,the acceleration spectrum density control index was turned into the control of blasting vibration velocity,and the vibration peak velocity of 0.05 cm/s was forecasted. Considering the engineering cost,the deep-hole blasting method could be used in some areas. After blasting experiment,when the Ms–6,Ms–7,Ms–8 sections of the nonel tube detonators was used in the holes,and Ms–4,Ms–5 sections of the nonel tube detonators on the surface,the blasting vibration peak velocity was not greater than 0.02 cm/s. At this time,the lithography platforms were working properly. It showed that transition from the acceleration power spectrum density control to the control of the blasting vibration velocity index is feasible. This transformation could provide a blasting scheme design reference with the presence of precision instruments.