中文摘要：

以商业锌粉为原料，采用超声化学法制备ZnO纳米颗粒薄膜，主要步骤为：滚压振动研磨锌粉；超声分散制备ZnO分散液；分别以聚乙烯醇、硅溶胶为成膜助剂和粘结剂，制备纳米ZnO薄膜。对比研究了60℃和90℃下所得纳米ZnO薄膜的结构、表面形貌和电学性能。结果表明，所得氧化锌为六角纤锌矿结构，无杂质存在。60℃干燥所得ZnO薄膜表面较90℃干燥所得薄膜更为细致、均匀。60℃和90℃干燥所得薄膜的导通电压分别为1．2V和4．0V。

英文摘要：

ZnO nanoparticle film was prepared by sonochemical method using commercial zinc powder as raw material. The main processes are as follows： grinding zinc powder by rolling vibration mill; preparing ZnO dispersion liquid by ultrasonic method; preparing nano-ZnO thin film using polyvinyl alcohol and silica sol as the film-forming auxiliary agent and binder respectively. The structure, surface morphology, and electrical properties of the nano ZnO thin films obtained by drying at 60 ℃ and 90 ℃ were comparatively studied. The results show that the obtained zinc oxide is hexagonal wurtzite-structured and impurity-free The surface of ZnO thin film obtained at 60 ℃ is more compact and uniform than that obtained at 90℃. The break- over voltages of the ZnO thin films obtained at 60 ℃ and 90℃ are 1.2 V and 4.0 V, respectively.