采用阳极氧化法以NH4F/乙二醇为电解液制备高度有序的TiO2纳米管,研究了不同电解液浓度、电解电压、电解时间等参数对TiO2纳米管的影响。在不同温度下对TiO2纳米管进行退火处理。分别利用转靶X射线衍射仪(XRD)和场发射扫描电子显微镜(SEM)对TiO2纳米管阵列的物相结构和形貌变化进行表征。结合氧化过程电流密度变化探讨了TiO2纳米管的生长机理。结果表明,不同的阳极氧化参数对TiO2纳米管的形貌有着一定的影响,不同退火温度可以使TiO2纳米管的晶相结构发生转变。
We fabricated highly ordered arrays of TiO2 nano-tubes(NT) by anodizing Ti foil in ethylene glycol and NH4F electrolyte.The same time,we studied the effects by changing anodization parameters including the content in electrolyte,voltage and reaction time.Using scanning electron microscopy(SEM) and X-ray diffraction(XRD) we analyzed the nanostructure and morphology of the TiO2 nano-tubes.And we discussed the mechanism of the NT array formation in reference with the current-time curve.The results showed that TiO2 nano-tubes diameters and morphologies changed by altering of varying anodization parameters.The crystal type can change after the TiO2 nano-tubes were annealed at different temperatures.