文章讨论了低温共烧陶瓷(Low Temperature Co—Fired Ceramic——LTCC)埋置电感的几何结构,并进行了仿真。分析了结构变化对电感各参数的影响,并通过LTCC工艺流程实现样品的制作。经Agilent4285A及4291B等仪器测试,仿真结果与实测结果完全一致,为等效模型的提取和元件库的建立奠定了基础。
The geometrical design of a embedded inductor in LTCC was discussed in this paper.It was found that the variation of parameters have close relation with the inductor structure.The experimental result conform with the simulated data well,which lays a good foundation for the extraction of equivalent circuit and establishment of device database.