中文摘要：

采用射频磁控溅射法分别在100、200、300W和400W功率下制备了4种锂离子电池用Sb薄膜负极材料。通过X射线衍射光谱法（XRD）、扫描电子显微镜法（SEM）、电感耦合等离子体光谱分析法（1CP）、恒电流充放电对4种薄膜材料的结构、形貌及循环性能等进行了表征。实验结果表明，随着溅射功率增加，Sb薄膜晶化程度加剧，结晶趋于完整，颗粒粗化。在相同溅射时间30min的情况下，当功率为300W时，获得的Sb薄膜电极具有最好的循环性能。首次嵌锂比容量达640mAh／g，20次循环后比容量维持在323mAh／g，容量保持率为51％。

英文摘要：

Three kinds of Sb thin films as anodes of lithium ion battery have been fabricated by radio frequency magnetron sputtering with sputtering power of 100, 200, 300 and 400 W, respectively. The crystal structure, morphology and cyclic performance of the films were characterized by X-ray diffraction （XRD）, scanning electron microscopy （SEM）, coupled plasma spectroscopy （ICP） and the galvanostatic charge/discharge （GC） measurements. The experimental results show that with increasing the sputtering power, the crystal pricks up and the integrality of crystallization increases. The particles become bigger. It is found that under the same sputtering time of 30 min, the Sb electrode shows its good cyclic stability when the sputtering power is 300 W. Its initial discharge capacity is 640 mAh/g and it keeps 323 mAh/g after 20 cycles, 51% of the former.