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中文摘要：
采用磁控溅射法分别在150、250、400W功率下制备了3种锂离子电池用Sn薄膜负极材料。通过X射线衍射光谱法（×RD）、扫描电子显微镜法（SEM）、恒电流充放电对3种薄膜材料的结构、形貌及循环性能进行了表征。实验结果表明，随着溅射功率增加，薄膜的非晶成分减少，晶化加剧，颗粒粗化。在相同溅射时间20min的情况下，当溅射功率为250W时，获得的Sn薄膜电极具有最好的循环性能。首次嵌锂容量为653．8mAh／g，30次循环后容量维持在515mAh／g。容量保持率达79％。
英文摘要：
Three kinds of Sn thin films as anodes of lithium ion battery have been fabricated by magnetron sputtering with sputtering power of 150 W, 250 W and 400 W, respectively. The crystal structure, morphology and cycle performance of the films were characterized by X-ray diffraction （XRD）, scanning electron microscopy （SEM）, the galvanostatic charge/discharge （GC） measurement. The experimental results show that with the sputtering power increasing, the amorphous of the films decreases, the crystallization increases and the particles coarsen. It is found that under the same sputtering time of 20 min, the Sn electrode shows its good cycle stability when the sputtering power is 250 W. Its initial discharge capacity is 653.8 mAh/g and it keeps 515 mAh/g after 30 cycles, 79% of the former.
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Lithium intercalation/de-intercalation behavior of a composite Sn/C thin film fabricated by magnetro
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