中文摘要：

利用溶胶-凝胶法结合高温热处理在硅衬底上制备了掺Mn硅酸锌薄膜，用XRD、SEM、UV-Vis吸收谱和PL谱测试了样品的结晶性能与光学性能，并分析了热处理温度对掺Mn硅酸锌薄膜的结晶性能和光学性能的影响．实验结果发现，ZnO的适量存在对掺Mn薄膜的发光有增强作用．进一步的分析认为，这一现象的机理可由G．G．Qin提出的量子约束-发光中心（QCLC）模型进行解释，ZnO中受激发的电子和空穴通过隧穿效应到达硅酸锌基体中复合发光，从而增强发光强度．

英文摘要：

Magnesium-doped zinc silicate Zn2SiO4：Mn） was prepared on oxidized silicon wafer by a simple sol-gel process. The crystallinity of films was characterized by X-ray diffraction and optical properties were measured by UV-Vis and photoluminescence spectra. The influence of annealing temperature on films properties was also studied systematically. It＇s found that proper ZnO can enhance the photoluminescence intensity of Zn2SiO4：Mn films. And the mechanism was explained by using the model of quantum confinement-luminescence center proposed by G.G. Qin.