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中文摘要：
为了扩展扫描电镜的用途，实现微结构物性在线检测，本文基于4-PUU并联机构设计了一种扫描电镜定位平台．其结构简单，便于集成微操作装置．为优化平台机构的性能，本文建立了4-PUU机构的空间尺寸模型，绘制了机构性能图谱，分析了机构参数对机构可达工作空间、灵巧性、速度性能的影响，得到了具有良好性能的平台机构参数．
英文摘要：
In order to extend the applications of SEMs （Scanning Electron Microscopes） and detect online the physical performance of microstructure, a positioning platform for SEM based on a 4-PUU parallel mechanism is designed. The parallel platform is of simple structure and easy to integrate micro-manipulation mechanisms. In order to optimize the performance of the positioning platform, a spatial dimension model for the 4-PUU mechanism is established. The performance atlases are generated, the effects of the mechanical parameters on such performances as the reachable workspace, dexterity and velocity are analyzed, and some platform mechanical parameters for achieving good performance are obtained.
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