中文摘要：

红外武器系统的快速发展，对红外仿真系统提出了更高的要求。微桥电阻阵列作为红外仿真系统的核心器件，其性能的提高对红外仿真系统的发展至关重要。微桥电阻是利用电阻加热微辐射元来产生红外辐射的，根据微桥电阻的工作原理可知，提高微桥电阻阵列单元辐射效率是微桥电阻性能提高的关键技术之一。利用以Al为反射层电阻、空气为中间介质层和TiNx为吸收层电阻组成的谐振腔结构可以明显提高所需波段的红外辐射效率．从而提高微桥电阻的性能。共振吸收结构为微桥电阻阵列的进一步低功耗、大面阵化提供了有效的设计和制作途径。

英文摘要：

The rapid development of infrared armament system puts forward higher requirement to the infrared simulation system. As a key part of the infrared simulation system, the performance of suspend resistor array is very important. Suspend resistor produces infrared radiation by using resistor to heat up infrared micro-emitter and how to improve the radiation efficiency of suspend resistor array cells is one of the key technologies to improve the performance of suspend resistor. The resonant-cavity structure composed of Al as reflector resistance, air as medium layer and TiNx as absorbing layer resistance can enhance infrared radiation efficiency of the needed wave band remarkably, so that the performance of suspend resistor is enhanced. Resonant absorption structure provides an effective method for designing and manufacturing microbridge resistor arrary with less power consumption and larger array.