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Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchanne
  • ISSN号：0146-9592
  • 期刊名称：Optics Letters
  • 时间：2013.11.15
  • 页码：4613-4616
  • 相关项目：激光微/纳制造
作者： Liu P.J.|Jiang L.|Hu J.|Yan X.L.|Xia B.|Lu Y.F.|
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激光微/纳制造
期刊论文 50 专利 5
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