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飞秒激光微通道加工研究进展
  • ISSN号：1001-0645
  • 期刊名称：《北京理工大学学报》
  • 时间：0
  • 分类：TN249[电子电信—物理电子学]
  • 作者机构：[1]美国密苏里科技大学机械与航天工程系,罗拉,密苏里,美国65409, [2]北京理工大学先进加工技术国防重点学科实验室,北京100081
  • 相关基金：国家“九七三”计划项目（2011CB013000）;国家自然科学基金资助项目（90923039,51025521）
作者： 蔡海龙[1,2], 闫雪亮[2], 王素梅[2], 夏博[2], 刘鹏军[2], 姜澜[2]
关键词： 微通道, 飞秒激光, 改性, mieroehannel, femtoseeond laser, modification
中文摘要：

综述了基于飞秒激光微通道制造的研究现状，包括加工机理、工艺技术方面的研究进展，重点介绍了飞秒激光改性辅助化学刻蚀和液体辅助飞秒激光烧蚀两大主要制造方法上的研究成果，概述了目前面临的主要问题与挑战，展望了未来的发展趋势．

英文摘要：

Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microehannels are reviewed, especially for femtoseeond laser irradiation followed by chemical etching and liquid assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

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Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-elect
<strong>Fiber Mach-Zehnder interferometer based on microcavities for high-temperature sensing
Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchanne
Femtosecond laser-induced cross-periodic structures on a crystalline silicon surface under low pulse
Crystal orientation dependence of femtosecond laser-induced periodic surface structure on (100) sili
Self-organizing microstructures orientation control in femtosecond laser patterning on silicon
Phase change adjustments in dielectrics by femtosecond pulse trains
Simulation of rippled structure adjustments based on localized transient electron dynamics control b
Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics contro
High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control u
Chemical vapor sensors based on whispering gallery modes in an optical fiber micro-resonator coated
Design optimization of GaAs betavoltaic batteries
Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-wid
Subwavelength ripples adjustment based on electron dynamics control by using shaped ultrafast laser
A new Mach-Zehnder interferometer in a thinned-cladding fiber fabricated by electric arc for high se
First-principles calculations of the electron dynamics during femtosecond laser pulse train material
High sensitivity of taper-based Mach-Zehnder interferometer embedded in a thinned optical fiber for
Selective triggering of phase change in dielectrics by femtosecond pulse trains based on electron dy
Femtosecond laser pulse-train induced breakdown in fused silica: The role of seed electrons
Polarization-independent etching of fused silica based on electrons dynamics control by shaped
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飞秒激光微孔加工
Ultrafast Laser Fabrication of Novel Fiber Mach-Zehnder Interferometer Sensors and Its Cost-Effective Alternative Manufacturing Methods （Invited Paper）
Electrode pattern design for GaAs betavoltaic batteries
Built-in electric field thickness design for betavoltaic batteries
A method to fabricate 2D nanoparticle arrays
An all-optical fiber sensor fabricated by a femtosecond laser for temperature sensing
Size distribution control of metal nanoparticles using femtosecond laser pulse train: a molecular dy
Laser-assisted nanofabrication of carbon nanostructures
High-temperature reflective sensor based on single fusion-splicing f iber taper without coating
Transient localized electron dynamics simulation during femtosecond laser tunnel ionization of diamo
Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon
Resonant effects in nonlinear photon absorption during femtosecond laser ablation of Nd-doped silica
Formation mechanisms of sub-wavelength ripples during femtosecond laser pulse train processing of di
Femtosecond laser processing of fused silica and aluminum based on electron dynamics control by shap
Chemical activation of carbon nano-onions for high-rate supercapacitor electrodes
Adjustment of ablation shapes and subwavelength ripples based on electron dynamics control by design
Nonlinear ionization mechanism dependence of energy absorption in diamond under femtosecond laser ir
High-temperature sensor based on an abrupt-taper Michelson interferometer in single-mode fiber
Adjustments of dielectrics craters and their surfaces by ultrafast laser pulse train based on locali
Direct writing anisotropy on crystalline silicon surface by linearly polarized femtosecond laser
Seed-free growth of diamond patterns on silicon predefined by femtosecond laser direct writing
Single-step formation of graphene on dielectric surfaces
Frequency dependence of electron dynamics during femtosecond laser resonant photoionization of Li-4
Femtosecond laser-induced periodic structure adjustments based on electron dynamics control: from su
Measurement of beta particles induced electron-hole pairs recombination in depletion region of GaAs
Femtosecond double-pulse fabrication of hierarchical nanostructures based on electron dynamics contr
An effective method for state population within time-dependent density functional theory
Design and optimization of liquid core optical ring resonator for refractive index sensing
Ultra-abrupt tapered fiber Mach-Zehnder interferometer sensors
Ultrafast laser fabrication of novel fiber Mach-Zehnder interferometer sensors and its cost-effectiv
Fiber inline interferometric refractive index sensors fabricated by femtosecond laser and fusion spl
Fiber Mach-Zehnder interferometer based on microcavities for high-temperature sensing with high sens
Femtosecond laser fabricated all-optical fiber sensors with ultrahigh refractive index sensitivity:
Ultrasensitive chemical sensors based on whispering gallery modes in a microsphere coated with zeoli
Surface-enhanced Raman scattering microchip fabricated by femtosecond laser
Laser-treated substrate with nanoparticles for surface-enhanced Raman scattering
Real-time depth measurement for micro-holes drilled by lasers
Femtosecond and nanosecond laser fabricated substrate for surface-enhanced Raman scattering
Two-step femtosecond laser pulse train fabrication of nanostructured substrates for highly surface-e
First-principles electron dynamics control simulation of diamond under femtosecond laser pulse train
Surface-enhanced Raman spectroscopy using gold-coated horizontally aligned carbon nanotubes
Femtosecond laser fabrication of long period fiber gratings and applications in refractive index sen
Ultrasensitive thermal sensors based on whispering gallery modes in a polymer core optical ring reso
Betavoltaic battery conversion efficiency improvement based on interlayer structures
Short pulse laser micro/nano manufacturing: Fundamentals and applications
Advances in femtosecond laser fabrication of microchannels
A high-quality Mach-Zehnder interferometer fiber sensor by femtosecond laser One-Step processing
Simulation and optimization of polymer-coated microsphere resonators in chemical vapor sensing
Investigations of femtosecond-nanosecond dual-beam laser ablation of dielectrics
Thermostable refractive index sensors based on whispering gallery modes in a microsphere coated with
Femtosecond laser drilling of micro-holes
Simultaneous measurement of refractive index and temperature using a microring resonator
飞秒激光微孔加工
Ultrafast Laser Fabrication of Novel Fiber Mach-Zehnder Interferometer Sensors and Its Cost-Effective Alternative Manufacturing Methods （Invited Paper）
Electrode pattern design for GaAs betavoltaic batteries
Built-in electric field thickness design for betavoltaic batteries
High resolution angular-displacement sensor based on whispering gallery mode resonance in bent optical fibers
飞秒激光改性区选择性化学腐蚀加工光纤微纳结构传感器
飞秒激光烧蚀加工恒弹性合金的规律研究
改进型飞秒写制长周期光纤光栅及其高温特性
飞秒激光烧蚀长周期光纤光栅的高温特性研究
飞秒激光加工光波导的工艺与传输特性研究
二次校准光纤光栅温度传感器
飞秒激光微孔加工
周期性微结构的纳秒激光四光束干涉烧蚀研究
超快激光制备金属表面微纳米抗反射结构进展
飞秒激光诱导周期性表面结构及其应用
飞秒激光加工扭转型长周期光纤光栅的特性研究
飞秒激光共振吸收对掺Pr-Nd硅玻璃烧蚀阈值的影响
不锈钢表面陷光微结构的纳秒激光制备
医用316L不锈钢表面微结构的飞秒激光制备及血液相容性研究
H_2气氛退火处理温度对磁控溅射ZnO薄膜光电性能的影响
飞秒激光不锈钢表面陷光微结构的制备与性能研究
Ultra-sensitive graphene strain sensor for sound signal acquisition and recognition
Three-dimensional porous graphene sponges assembled with the combination of surfactant and freeze-drying
Magnetic transitions in graphene derivatives
激光与石墨烯相互作用的研究现状及发展趋势
低功率CO2激光辐照对多层石墨烯结构的影响
激光辐照对热退火金属/掺氟二氧化锡透明导电薄膜光电性能的影响
Effect of Annealing on the Morphology,Structure and Photoelectric Properties of AZO/Pt/FTO Trilayer Films
激光微量热泳技术研究碳量子点与脱氧核酸分子的亲和行为
Ti-Ni合金飞秒激光打孔规律研究
Facile production of ultrathin graphitic carbon nitride nanoplatelets for efficient visible-light water splitting
Preparation and Spectral Analysis of Gold Nanoparticles Using Magnetron Sputtering and Thermal Annealing
飞秒激光刻写全光纤马赫-泽德尔传感器件的研究进展
期刊信息
  • 《北京理工大学学报》
  • 北大核心期刊（2011版）
  • 主管单位:中华人民共和国工业和信息化部
  • 主办单位:北京理工大学
  • 主编：黄风雷
  • 地址：北京海淀区中关村南大街5号
  • 邮编：100081
  • 邮箱：blgzw@bit.edu.cn
  • 电话：010-68912326 68913988
  • 国际标准刊号：ISSN：1001-0645
  • 国内统一刊号：ISSN：11-2596/T
  • 邮发代号:82-502
  • 获奖情况:
  • 全国优秀高等学校自然科学学报及教育部优秀科技期...,首届国家期刊奖提名奖,中文核心期刊
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,美国数学评论（网络版）,德国数学文摘,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）,英国英国皇家化学学会文摘,中国北大核心期刊（2000版）
  • 被引量:17163