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中文摘要：
飞秒激光具有超快、超强的特性，在微孔加工中有着独特的优势，尤其是针对高品质、大深径比的微孔加工有着不可替代的作用。介绍了超短脉冲激光微孔加工的优势以及研究意义，综述了近十几年来基于超短脉冲激光的微孔加工研究现状，并讨论了材料、激光脉冲参数、加工方式和加工环境等因素对超短脉冲激光微孔加工的影响。指出了现阶段超短脉冲激光微孔加工的应用前景，并总结了超短脉冲激光微孔加工当前所面临的挑战，以及今后的研究重点。
英文摘要：
With ultrashort pulses and ultra high power densities, femtosecond laser has unique advantages in microholes drilling, especially for high-quality and high-aspect-ratio micro-holes. The advantages and study implications of ultrashort pulse laser drilling of micro-holes are introduced. Major progress in femtosecond laser drilling of microholes is reviewed. The impacts of materials properties, laser parameters, drilling methods and ambient environments are discussed. In addition, potential applications, key challenges and future research trends are presented.
同期刊论文项目
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Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchanne
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Crystal orientation dependence of femtosecond laser-induced periodic surface structure on (100) sili
Simulation of rippled structure adjustments based on localized transient electron dynamics control b
Ultrafast laser ablation size and recast adjustment in dielectrics based on electron dynamics contro
High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control u
Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-wid
A new Mach-Zehnder interferometer in a thinned-cladding fiber fabricated by electric arc for high se
First-principles calculations of the electron dynamics during femtosecond laser pulse train material
Selective triggering of phase change in dielectrics by femtosecond pulse trains based on electron dy
Size distribution control of metal nanoparticles using femtosecond laser pulse train: a molecular dy
Transient localized electron dynamics simulation during femtosecond laser tunnel ionization of diamo
Resonant effects in nonlinear photon absorption during femtosecond laser ablation of Nd-doped silica
Formation mechanisms of sub-wavelength ripples during femtosecond laser pulse train processing of di
Femtosecond laser processing of fused silica and aluminum based on electron dynamics control by shap
Adjustment of ablation shapes and subwavelength ripples based on electron dynamics control by design
Nonlinear ionization mechanism dependence of energy absorption in diamond under femtosecond laser ir
Adjustments of dielectrics craters and their surfaces by ultrafast laser pulse train based on locali
Femtosecond laser-induced periodic structure adjustments based on electron dynamics control: from su
Femtosecond double-pulse fabrication of hierarchical nanostructures based on electron dynamics contr
Ultrafast laser fabrication of novel fiber Mach-Zehnder interferometer sensors and its cost-effectiv
Fiber inline interferometric refractive index sensors fabricated by femtosecond laser and fusion spl
Fiber Mach-Zehnder interferometer based on microcavities for high-temperature sensing with high sens
Ultrasensitive chemical sensors based on whispering gallery modes in a microsphere coated with zeoli
Two-step femtosecond laser pulse train fabrication of nanostructured substrates for highly surface-e
First-principles electron dynamics control simulation of diamond under femtosecond laser pulse train
Femtosecond laser fabrication of long period fiber gratings and applications in refractive index sen
Ultrasensitive thermal sensors based on whispering gallery modes in a polymer core optical ring reso
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