Reduction of structural defects in a-plane GaN epitaxy by use of periodic hemispherical patterns in
- ISSN号:1071-1023
- 期刊名称:Journal of Vacuum Science and Technology B
- 时间:0
- 页码:021005-021005
- 相关项目:非极性面高Al组分AlGaN基深紫外LED外延材料与器件的研究
作者:
Wu, Z. H.|Fischer, A. M.|Ponce, F. A.|Sun, Y. Q.|Yin, J.|Fang, Y. -Y|Dai, J. N.|Chen, C. Q.|Wei, Q. Y.|Li, T.|Sun, W.|