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中文摘要：
采用溶胶-凝胶法制备了用于高功率激光装置的SiO_2减反射膜,并在室温条件下采用气相法对该薄膜进行表面修饰。结果表明：修饰后薄膜的疏水性能、激光损伤阈值均有明显提高;其在大气环境下的耐候性与普通薄膜相当,但对有机污染物的抗性明显提高;经六甲基二硅胺烷修饰、氨气氛及热处理后的薄膜表现出对有机烷类良好的抗污染性能。
英文摘要：
The SiO_2 antireflective（AR） coatings for high peak power laser systems were prepared using sol-gel method,and vaporphase treated at room temperature with organosilanes such as hexamethyldisilazane（HMDS） and tnmethylchlorosilane（TMCS）.The results show that the post-treated sol-gel AR coatings are more hydrophobic than standard TEOS-based sol-gel AR coatings and presented an increase in their laser induced damage threshold.The post-treated coatings are as durable as normal SiO_2 AR coatings.But their resistance to contamination by a series of volatile organic compounds is better than those without post-treatment.The coatings treated with ammonia and HMDS after heat treatment show an even better contamination resistant capability to organic alkane.After being contaminated for 70 h with hexane,the transmittance of the coatings decreases only marginally.
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