中文摘要：

：为了实现机器人智能皮肤对三维力的探测，基于炭黑／碳纳米管／硅橡胶的表面压阻效应，设计了2种不同排布的对称结构的四叉指电极三维力柔性触觉传感器．理论分析了这2种三维力传感器的工作原理，并对这2种结构的传感器进行了量程、灵敏度、线性度等实验对比，实验证明四电极方形排布的传感器在剪切力方向拥有更高的灵敏度和更好的线性度，但量程相对十字形排布的传感器较小。通过三维力实验表明，这2种新型的三维力柔性触觉传感器均具备检测三维力的功能，可在机器人皮肤等实际应用场合，根据工作量程和灵敏度的不同要求来选择传感器结构。

英文摘要：

In order to realize 3D force detection of intelligent robot skin, and based on surface piezoresistive effect of car- bon black/carbon nanotubes/silicone rubber, two 3D force flexible tactile sensors with different arrangement and four in- terdigitated electrodes with symmetrical structure are designed in this paper. The working principle of two 3D force tactile sensors is theoretically analyzed, and the experiment results of measurement range, sensitivity and linearity of these two structure sensors have been compared. The experimental results show that the sensor with four electrodes squared ar- rangement has a higher sensitivity and better linearity in shear force direction, but the measurement range is smaller than that of the sensor with four electrodes cross-shaped arrangement. The 3D force experimental results show that these two kinds of new 3D force flexible tactile sensors have the function of 3D force detection. In practical application such as ro- bot skin, different structures of the sensor can be selected according to the different requirements of working range and sensitivity.