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中文摘要：
文章介绍了自主研发的高能量电子枪的原理、设计和测试结果。该电子枪主要由电子发射组件、电磁聚焦组件、电磁偏转组件、差分抽真空维持机构和控制电源构成,可以发射、聚焦并偏转高能量电子。测试结果显示,电子枪发射的电子能量最大可达30 ke V,加速电压和发射电流成正比例对应关系,电子束斑直径在100μm以下,电子束偏转角度大于5°。通过实测Si（111）单晶体,获得了良好的电子衍射图像。
英文摘要：
The principle, design and test results of a domestically made high-energy elec- tron gun are described. It consists mainly of a filament, electromagnetic focusing lens, electromag- netic deflection lens, differential vacuum pumping unit, and power supply. It is capable of produc- ing high energy electrons up to 30 keV. The electron beam can be deflected more than 5° and the beam size focused to less than 100 μm. The acceleration voltage is found to be directly proportion- al to the emission current. Details of the design and test results are reported.
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