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The combined effect of surface roughness and internal stresses on nanoindentation tests of polysilic
  • ISSN号：0021-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：2012.8.15
  • 页码：044512-
  • 相关项目：单片集成的弯曲悬臂梁式三轴热对流加速度传感器研究
作者： Quan Wang|Ran Hu|Ying shao|
同期刊论文项目
单片集成的弯曲悬臂梁式三轴热对流加速度传感器研究
期刊论文 19 获奖 1 专利 2 著作 1
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