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Plasma enhanced CVD of fluoroc
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  • 相关项目：利用辉光介质阻挡放电沉积多种功能性薄膜
作者： 李伟，刘东平，冯志庆，陈宝祥，
同期刊论文项目
利用辉光介质阻挡放电沉积多种功能性薄膜
期刊论文 18 会议论文 2
同项目期刊论文
Deposition of amorphous carbon
Surface roughness of various d
Plasma deposition of fluorocar
Growth of fluorocarbon films b
Deposition of SiO2 films by lo
Surface properties of diamond-
Structures of diamond-like car
Theoretical analysis of ion ki
Surface and electron emission
近红外相关光谱的多元散射校正处理研究
ICP—CVD制备氟化非晶碳（a—C：F）薄膜的研究
Surface properties of diamond-like carbon films prepared by CVD and PVD methods
Surface Roughness of Various Diamond-Like Carbon Films
DBD—PECVD法制备高疏水性氟碳聚合物（a—C：F）薄膜的研究
Growth of Fluorocarbon Films by Low-Pressure Dielectric Barrier Discharge
热丝CVD制备微晶硅薄膜的研究
Theoretical analysis of ion kinetic energies and DLC film deposition by CH4＋ Ar （He） dielectric barrier discharge plasmas