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The in?uence of processing gas on the mechanical properties of sputtered B–C–N–H ?lms
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：8575-8581
  • 语言：英文
  • 相关项目：空间润滑材料与技术研究
同期刊论文项目
空间润滑材料与技术研究
期刊论文 186 获奖 1 专利 68
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