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Mg预处理蓝宝石衬底法制备的Zn极性ZnO外延薄膜的结构研究
  • ISSN号：1000-6281
  • 期刊名称：《电子显微学报》
  • 时间：0
  • 分类：O484.1[理学—固体物理;理学—物理] TN304.2[电子电信—物理电子学]
  • 作者机构：[1]北京凝聚态物理国家实验室,中国科学院物理研究所,北京100080, [2]School of Engineering and Centre for Microscopy and Microanalysis, The University of Queensland, St Lucia QLD 4072, Australia, [3]清华大学物理系,北京100084, [4]北京工业大学固体微结构与性能研究所,北京100022
  • 相关基金：国家自然科学基金资助项目（No.50532090,No.60606023,No.60476044）; 科技部973项目（2002CB613502）; Australia Research Council discovery project（DP0663304）.
作者： 王勇[1,2], 袁洪涛[1], 杜小龙[1], 梅增霞[1], 曾兆权[1], 邹进, 贾金峰[3], 薛其坤[1,3], 张泽[4]
关键词： ZNO薄膜, 透射电子显微术, 电子全息术, 极性, X射线能谱, ZnO, TEM, polarity, electron holography, X-ray
中文摘要：

通过分子束外延法在经Mg预处理的蓝宝石衬底上制备了ZnO单晶薄膜,利用高分辨透射电镜、电子全息和X射线能谱对该薄膜的结构进行了细致的研究。结果表明,在蓝宝石衬底上预沉积一层很薄的Mg层,可以生长均匀Zn极性的ZnO外延薄膜。ZnO/MgO/蓝宝石的界面非常清晰锐利,同时在界面处可以观察到大约3个原子层的MgO。预沉积的Mg薄层对随后ZnO的极性选择起了关键性作用。

英文摘要：

　The structure of the ZnO films grown on（0001）sapphire using surface modification of magnesium pre-exposure has been investigated by high resolution transmission electron microscopy,electron holography and X-ray energy dispersive spectroscopy.It is found that pre-deposition of an ultra-thin magnesium film on the sapphire substrate plays a key role in zinc polarity selection and rotation domains elimination of ZnO films.In the resulting sharp interfaces of ZnO/MgO/sapphire,an ordered MgO layer（～3 atomic layers）was observed,which serves as a uniform template for nucleation and growth of a single-domain ZnO film.

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期刊信息
  • 《电子显微学报》
  • 中国科技核心期刊
  • 主管单位:中国科学技术协会
  • 主办单位:中国物理学会
  • 主编：张 泽
  • 地址：北京市海淀区中关村北二条13号5号楼301
  • 邮编：100190
  • 邮箱：dzxwxb@blem.ac.cn
  • 电话：010-82671519 62565522/3301
  • 国际标准刊号：ISSN：1000-6281
  • 国内统一刊号：ISSN：11-2295/TN
  • 邮发代号:
  • 获奖情况:
  • 曾获《中国科技论文统计源期刊（中国科技核心期刊）》,《中国科学引文数据库(核心库)》来源期刊,中国自然科学核心期刊（无线电电子学、电信技术类...
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  • 被引量:6569