中文摘要：

对不同温度真空退火的大厚度TiAlN涂层（厚度为65.3μm）的硬度、结合强度、残余应力、摩擦磨损等力学性能进行了系统的研究,以揭示真空退火工艺对大厚度涂层力学性能的影响规律。结果表明,随着退火温度增加,涂层应力得到释放,600℃退火后全膜厚平均应力降至-0.154 GPa,应力沿层深分布更加均匀,涂层硬度逐渐下降,但仍保持较高硬度值,膜基结合强度增强,磨损率略有上升。

英文摘要：

The TiAlN thick films with N-content gradient were synthesized by arc ion plating on substrate of 316 L stainless steel. The influence of the nitrogen flow-rate and annealing in vacuum on the nitrogen depth-profile and tribological properties of the coatings was investigated with X-ray diffraction,scanning electron microscopy,and conventional mechanical probes. The results show that the N2 flow-rate and annealing temperature strongly affected the nitrogen depth profile,tribological properties and interfacial adhesion of the TiAlN coatings. For example,deposited for 150 min,at the N2 flow-rate,increasing linearly with the deposition time from 5sccm to 150 mL / min,the 65. 3 mm thick TiAlN coatings displayed a top-down decreasing nitrogen depth profile; as the annealing temperature increased,the increasingly uniform residual stress significantly decreased down to an average of -0. 154 GPa at 600℃,accompanied by a gradual decrease of micro-hardness and the slight increases of the wear-rate and interfacial adhesion.