采用电弧离子镀方法制备了不同厚度和不同Al含量的TiAlN涂层,讨论了Al含量及涂层厚度对其硬度、结合力、残余应力等力学性能的影响.结果表明,Al含量增加或涂层厚度增加,将导致涂层中大颗粒增加,膜基界面剪切力增大,涂层硬度增加,膜基结合力逐渐下降.
The TiAlN coatings with different Al content and different thickness were deposited by Arc Ion Plating (AIP). The mechanical properties of the coatings, such as hardness, adhesion, residual stresses, were systematically studied. The results show that with the increasing of Al content or the thickness of coating, the drops in the coatings, the hardness and the shear force on the interface between film and substrate areto increase, while the adhesion decreases.